会议文集


会议名66th SVC Annual Technical Conference
中译名《第六十六届真空镀膜机学会年度技术会议》
机构Society of Vacuum Coaters (SVC)
会议日期May 6-11, 2023
会议地点Washington, DC, USA
出版年2023
馆藏号351689


题名作者出版年
Microstructure quantification of oblique angle sputtered porous a-Si thin films as a basis for structure-property relations of solid phase microextraction coatingsBehnam Moeini; David T. Fullwood; Paul Minson; Daniel Shollenberger; David S. Bell; Morris D. Argyle; Richard Vanfleet; Matthew R. Linford2023
Simulation of a hollow-cathode PECVD process in O2/TMDSO for silicon dioxide deposition - Cross-code validation of 2D plasma model and global plasma modelKristina Tomankova; Martin Kubecka; Nicolas Rivolta; David Cornil; Adam Obrusnik2023
A comparative study between PVD-TiMgN and PVD-TiMgGdN sputtered coatings to evaluate the influence of Gd and its effect on the corrosion properties of the individual coatingsThomas Ulrich; Holger Hoche; Peter Polcik; Joachim Brotz; Peter Kaestner; Matthias Oechsner2023
A model to predict the s-phase thickness and the change in corrosion behavior toward H_2SO_4 of 316L austenitic stainless steel after plasma nitridingPhillip Marvin Reinders; Gunter Brauer2023
Influence of fitting algorithms on thickness determination during monitoring of optical coatingsThomas Melzig; Tatiana Amochkina; Stefan Bruns; Philipp Henning; Jorg Terhurne; Michael Trubetskov; Michael Vergohl2023
Plasma deposited amorphous silicon passivation layers on InAs surfacesJohn P. Murphy; Erin R. Cleveland; David R. Boris; Michael J. Johnson; Scott G. Walton; Jill A. Nolde2023
When magnetron sputtering deposition meets machine learning: Application to process anomaly detectionValentin Delchevalerie; Nicolas de Moor; Louis Rassinfosse; Emile Haye; Benoit Frenay; Stephane Lucas2023
Tunable, graded band-gap TiO_2 thin film solar cell deposited by HIPIMS on flexible substrateYing-Hung Chen; Sheng-Kuei Chiu; Meng-Cheng Lai; Ping-Yen Hsieh; Ju-Liang He2023
Investigation and application of EB-PVD and related processes for high-rate deposition of aluminum alloysJens-Peter Heinss2023
High-temperature tribological behavior of nanolayered TiAlN/TiSiN coating deposited on WC-Co cemented carbideVladimir Terek; Lazar Kovacevic; Aljaz Drnovsek; Peter Panjan; Branko Skoric; Janez Kovac; Zoran Bobic; Pal Terek2023
A combinatorial hollow cathode discharge/plasma polymerization system for silver containing plasma parylene coatingPing-Yen Hsieh; Yu-Han Wei; Ying-Hung Chen; Hsi-Kai Tsou; Ju-Liang He2023
Surface chemical reactions of etch stop prevention in plasma-enhanced atomic layer etching of silicon nitrideJomar U. Tercero; Akiko Hirata; Michiro Isobe; Kazuhiro Karahashi; Masanaga Fukasawa; Satoshi Hamaguchi2023
Influence of multilayer nanoarchitecture on phase transformations in the Ti-Cr-Zr systemJulia Nascimento Pereira; Vincent Ott; Conrado Ramos Moreira Afonso; Artur Mariano de Sousa Malafaia; Michael Stuber; Christian Greiner; Haroldo Cavalcanti Pinto2023
Precise control and adjustment of uniformity for optical coatings on 2D and 3D componentsChris Britze; Philipp Henning; Michael Vergohl; Andreas Pflug; Thomas Melzig; Stefan Bruns; Bernd Schafer; Klaus Mann; Jorg Terhurne2023



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