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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2017, vol.27, no.1
2017, vol.27, no.10
2017, vol.27, no.11
2017, vol.27, no.12
2017, vol.27, no.2
2017, vol.27, no.3
2017, vol.27, no.4
2017, vol.27, no.5
2017, vol.27, no.6
2017, vol.27, no.7
2017, vol.27, no.8
2017, vol.27, no.9
题名
作者
出版年
年卷期
Electrowetting-actuated liquid metal for RF applications
Diebold, A. V.; Watson, A. M.; Holcomb, S.; Tabor, C.; Mast, D.; Dickey, M. D.; Heikenfeld, J.
2017
2017, vol.27, no.2
Light-absorbent liquid immersion angled exposure for patterning 3D samples with vertical sidewalls
Kumagai, Shinya; Kubo, Hironori; Sasaki, Minoru
2017
2017, vol.27, no.2
Tunable diffraction grating in flexible substrate by UV-nanoimprint lithography
Hamouda, F.; Aassime, A.; Bertin, H.; Bartenlian, B.; Dagens, B.; Gogol, P.
2017
2017, vol.27, no.2
Experimental and theoretical analysis of defocused CO2 laser microchanneling on PMMA for enhanced surface finish
Prakash, Shashi; Kumar, Subrata
2017
2017, vol.27, no.2
Microelectromechanical system-based electrochemical seismic sensors with an anode and a cathode integrated on one chip
Deng, T.; Sun, Z.; Li, G.; Chen, J.; Chen, D.; Wang, J.
2017
2017, vol.27, no.2
Fabricating and controlling PCL electrospun microfibers using filament feeding melt electrospinning technique
Ko, Junghyuk; Ahsani, Vahid; Yao, Selina Xiangxiao; Mohtaram, Nima K.; Lee, Patrick C.; Jun, Martin B. G.
2017
2017, vol.27, no.2
Design, fabrication, and characterization of bridge-type micro-hotplates with an SU-8 supporting layer for a smart gas sensing system
Iwata, T.; Soo, W. P. C.; Matsuda, K.; Takahashi, K.; Ishida, M.; Sawada, K.
2017
2017, vol.27, no.2
Fabrication and electrical characterization of sub-micron diameter through-silicon via for heterogeneous three-dimensional integrated circuits
Abbaspour, R.; Brown, D. K.; Bakir, M. S.
2017
2017, vol.27, no.2
Aluminum-based one- and two-dimensional micro fin array structures: high-throughput fabrication and heat transfer testing
Primeaux, Philip A.; Zhang, Bin; Zhang, Xiaoman; Miller, Jacob; Meng, W. J.; Pratik, K. C.; Moore, Arden L.
2017
2017, vol.27, no.2
A double-lithography and double-reflow process and application to multi-pitch multi-height mechanical flexible interconnects
Zhang, Chaoqi; Yang, Hyung Suk; Bakir, Muhannad S.
2017
2017, vol.27, no.2
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