期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2017, vol.27, no.1 2017, vol.27, no.10 2017, vol.27, no.11 2017, vol.27, no.12 2017, vol.27, no.2 2017, vol.27, no.3
2017, vol.27, no.4 2017, vol.27, no.5 2017, vol.27, no.6 2017, vol.27, no.7 2017, vol.27, no.8 2017, vol.27, no.9

题名作者出版年年卷期
Controllable process of nanostructured GaN by maskless inductively coupled plasma (ICP) etchingZhao, Yanfei; Hu Wang; Wei Zhang; Li, Jiadong; Yang Shen; Huang, Zengli; Jian Zhang; An Dingsun20172017, vol.27, no.11
Micro thermal energy harvester design optimizationTrioux, E.; Monfray, S.; Basrour, S.20172017, vol.27, no.11
Optimization of the batch production of silicon fiber-top MEMS devicesRector, J. H.; Slaman, M.; Verdoold, R.; Iannuzzi, D.; Beekmans, S. V.20172017, vol.27, no.11
Low-stress photosensitive polyimide suspended membrane for improved thermal isolation performanceFan, J.; Xing, R. Y.; Wu, W. J.; Liu, H. F.; Liu, J. Q.; Tu, L. C.20172017, vol.27, no.11
Laser-bulge based ultrasonic bonding method for fabricating multilayer thermoplastic microfluidic devicesLiang, Chao; Liu, Chong; Liu, Ziyang; Meng, Fanjian; Li, Jingmin20172017, vol.27, no.11
Effect of deposition parameters on surface roughness and consequent electromagnetic performance of capacitive RF MEMS switches: a reviewChen, Zhiqiang; Tian, Wenchao; Zhang, Xiaotong; Wang, Yongkun20172017, vol.27, no.11
Printing-based fabrication method using sacrificial paper substrates for flexible and wearable microfluidic devicesChung, Daehan; Gray, Bonnie L.20172017, vol.27, no.11
A high-performance lab-on-a-chip liquid sensor employing surface acoustic wave resonanceKustanovich, K.; Yantchev, V.; Kirejev, V.; Jeffries, G. D. M.; Lobovkina, T.; Jesorka, A.20172017, vol.27, no.11
3D Si/ITO/WO3 photoelectrode with a micropost array structure for photocatalysis enhancementZheng, Deyin; Jiang, Xiufen; Liu, Mengyin; Zhao, Xin; Wang, Weichao; Sun, Guangyi20172017, vol.27, no.11
A MEMS resonant accelerometer with sensitivity enhancement and adjustment mechanismsXie, Jin; Ding, Hong; Wang, Wen; Ju, Bing-Feng20172017, vol.27, no.11
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