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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2025
2013, vol.23, no.1
2013, vol.23, no.10
2013, vol.23, no.11
2013, vol.23, no.12
2013, vol.23, no.2
2013, vol.23, no.3
2013, vol.23, no.4
2013, vol.23, no.5
2013, vol.23, no.6
2013, vol.23, no.8
2013, vol.23, no.9
题名
作者
出版年
年卷期
Resist deformation and flow fields in microimprint lithography
Du Jun; Wei Zhengying; Li Shize; Tang Yiping
2013
2013, vol.23, no.5
Diamond turning of small Fresnel lens array in single crystal InSb
R. G. Jasinevicius; J. G. Duduch; G. A. Cirino; P. S. Pizani
2013
2013, vol.23, no.5
Fabrication of 3D fractal structures using nanoscale anisotropic etching of single crystalline silicon
Erwin J. W. Berenschot; Henri V. Jansen; Niels R. Tas
2013
2013, vol.23, no.5
A novel generation of 3D SAR-based passive micromixer: efficient mixing and low pressure drop at a low Reynolds number
Vladimir Viktorov; Mohammad Nimafar
2013
2013, vol.23, no.5
Effects of getters on hermetically sealed micromachined cesium-neon cells for atomic clocks
M. Hasegawa; R. K. Chutani; R. Boudot; L. Mauri; C. Gorecki; X. Liu; N. Passilly
2013
2013, vol.23, no.5
Picosecond laser ablation for silicon micro fuel cell fabrication
Gianmario Scotti; Daniel Trusheim; Petri Kanninen; Denys Naumenko; Malte Schulz-Ruhtenberg; Valentinas Snitka; Tanja Kallio; Sami Franssila
2013
2013, vol.23, no.5
A MEMS differential viscometric sensor for affinity glucose detection in continuous glucose monitoring
Xian Huang; Siqi Li; Erin Davis; Charles Leduc; Yann Ravussin; Haogang Cai; Bing Song; Dachao Li; Domenico Accili; Rudolph Leibel; Qian Wang; Qiao Lin
2013
2013, vol.23, no.5
Facile fabrication of superhydrophobic poly(methyl methacrylate) substrates using ultrasonic imprinting
Young Hak Cho; Young Soo Seo; In Yong Moon; Bo Hyun Kim; Keun Park
2013
2013, vol.23, no.5
A surface-micromachined capacitive microphone with improved sensitivity
Chang Han Je; Jaewoo Lee; Woo Seok Yang; Jongdae Kim; Young-Ho Cho
2013
2013, vol.23, no.5
A novel batch-processing method for accurate crystallographic axis alignment
Jun Hyun Han; Shankar Radhakrishnan; Chung-Hoon Lee
2013
2013, vol.23, no.5
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