期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2011, vol.21, no.1 2011, vol.21, no.10 2011, vol.21, no.11 2011, vol.21, no.12 2011, vol.21, no.2 2011, vol.21, no.3
2011, vol.21, no.4 2011, vol.21, no.5 2011, vol.21, no.6 2011, vol.21, no.7 2011, vol.21, no.8 2011, vol.21, no.9

题名作者出版年年卷期
Effect of polymer orientation on pattern replication in a micro-hot embossing process: experiments and numerical simulationR. K. Jena; H. K. Taylor; Y. C. Lam; D. S. Boning; C. Y. Yue20112011, vol.21, no.6
Bistable out-of-plane stress-mismatched thermally actuated bilayer devices with large deflectionB. A. Goessling; T. M. Lucas; E. V. Moiseeva; J. W. Aebersold; C. K. Harnett20112011, vol.21, no.6
Scratch tests on micro-structured polymer surfaces produced by injection molding and reaction processesSascha Kuhn; August Burr; Michael Kubler; Matthias Deckert; Christoph Bleesen20112011, vol.21, no.6
Novel fabrication process for a monolithic PMMA torsion mirror and vertical comb actuatorSatoshi Amaya; Dzung Viet Dao; Susumu Sugiyama20112011, vol.21, no.6
Investigation of the optimal processing parameters for picosecond laser-induced microfabrication of a polymer-ceramic hybrid materialE. Kapyla; S. Turunen; J. Pelto; J. Viitanen; M. Kellomaki20112011, vol.21, no.6
A vacuum-driven peristaltic micropump with valved actuation chambersJianguo Cui; Tingrui Pan20112011, vol.21, no.6
A wafer-level multi-chip module process with thick photosensitive benzocyclobutene as the dielectric for microwave applicationJiajie Tang; Xiaowei Sun; Le Luo20112011, vol.21, no.6
Inclined nanoimprinting lithography-based 3D nanofabricationZhan Liu; David G. Bucknall; Mark G. Allen20112011, vol.21, no.6
A highly Integrated vertical SU8 valve for stepwise in-series reactionsV. Calvo; A. Ezkerra; J. Elizalde; L. J. Fernandez; J. Berganzo; K. Mayora; J. M. Ruano-Lopez20112011, vol.21, no.6
Improving performance of the metal-to-metal contact RF MEMS switch with a Pt-Au microspring contact designBo Liu; Zhiqiu Lv; Xunjun He; Meng Liu; Yilong Hao; Zhihong Li20112011, vol.21, no.6
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