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期刊
ISSN
0960-1317
刊名
Journal of Micromechanics and Microengineering
参考译名
微型机械与微型工程学报
收藏年代
2006~2025
全部
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2011, vol.21, no.1
2011, vol.21, no.10
2011, vol.21, no.11
2011, vol.21, no.12
2011, vol.21, no.2
2011, vol.21, no.3
2011, vol.21, no.4
2011, vol.21, no.5
2011, vol.21, no.6
2011, vol.21, no.7
2011, vol.21, no.8
2011, vol.21, no.9
题名
作者
出版年
年卷期
Heterogenous integration of a thin-film GaAs photodetector and a microfluidic device on a silicon substrate
Fuchuan Song; Jing Xiao; Fidaali Udawala; Sang-Woo Seo
2011
2011, vol.21, no.3
Dynamic actuation methods for capacitive MEMS shunt switches
M. E. Khater; K. Vummidi; E. M. Abdel-Rahman; A. H. Nayfeh; S. Raman
2011
2011, vol.21, no.3
A low-temperature parylene-to-silicon dioxide bonding technique for high-pressure microfluidics
A. T. Ciftlik; M. A. M. Gijs
2011
2011, vol.21, no.3
Real-time measurement of the three-axis contact force distribution using a flexible capacitive polymer tactile sensor
Hyung-Kew Lee; Jaehoon Chung; Sun-Il Chang; Euisik Yoon
2011
2011, vol.21, no.3
Roll-to-roll fabricated lab-on-a-chip devices
Asger Laurberg Vig; Tapio Makela; Paivi Majander; Vito Lambertini; Jouni Ahopelto; Andrs Kristensen
2011
2011, vol.21, no.3
Computer-controlled dynamic mode multidirectional UV lithography for 3D microfabrication
Jungkwun Kim; Mark G. Allen; Yong-Kyu Yoon
2011
2011, vol.21, no.3
Comb-drive GaN micro-mirror on a GaN-on-silicon platform
Yongjin Wang; Takashi Sasaki; Tong Wu; Fangren Hu; Kazuhiro Hane
2011
2011, vol.21, no.3
A new process for CMOS MEMS capacitive sensors with high sensitivity and thermal stability
S. S. Tan; C. Y. Liu; L. K. Yeh; Y. H. Chiu; Klaus Y. J. Hsu
2011
2011, vol.21, no.3
Electrokinetic and optical control of bacterial microrobots
Edward B. Steager; Mahmut Selman Sakar; Dal Hyung Kim; Vijay Kumar; George J. Pappas; Min Jun Kim
2011
2011, vol.21, no.3
A flexible tri-axis contact force sensor for tubular medical device applications
Miao Lu; Jijun Xiong; Tianhong Cui
2011
2011, vol.21, no.3
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