期刊


ISSN0960-1317
刊名Journal of Micromechanics and Microengineering
参考译名微型机械与微型工程学报
收藏年代2006～2025



全部

2006 2007 2008 2009 2010 2011
2012 2013 2014 2015 2016 2017
2018 2019 2020 2021 2022 2023
2024 2025

2007, vol.17, no.1 2007, vol.17, no.10 2007, vol.17, no.11 2007, vol.17, no.12 2007, vol.17, no.2 2007, vol.17, no.3
2007, vol.17, no.4 2007, vol.17, no.5 2007, vol.17, no.6 2007, vol.17, no.7 2007, vol.17, no.8 2007, vol.17, no.9

题名作者出版年年卷期
New developments in through-mask electrochemical micromachining of titaniumP. Kern; J. Veh; J. Michler20072007, vol.17, no.6
Simulation of ion beam induced micro/nano fabricationHeung-Bae Kim; Gerhard Hobler; Alois Lugstein; Emmerich Bertagnolli20072007, vol.17, no.6
Design, fabrication and testing of a silicon-on-insulator (SOI) MEMS parallel kinematics XY stageJingyan Dong; Deepkishore Mukhopadhyay; Placid M. Ferreira20072007, vol.17, no.6
Micro-Raman measurement of thickness in microelectromechanical silicon structuresXiaoming Wu; Jianyuan Yu; Tianling Ren; Litian Liu20072007, vol.17, no.6
A laser-micromachined polymeric membraneless fuel cellAidan Li; Siew Hwa Chan; Nam-Trung Nguyen20072007, vol.17, no.6
Implementation of three-dimensional SOI-MEMS wafer-level packaging using through-wafer interconnectionsChiung-Wen Lin; Hsueh-An Yang; Wei Chung Wang; Weileun Fang20072007, vol.17, no.6
A tunable microflow focusing device utilizing controllable moving walls and its applications for formation of micro-droplets in liquidsChun-Hong Lee; Suz-Kai Hsiung; Gwo-Bin Lee20072007, vol.17, no.6
Design, simulation and fabrication of a total internal reflection (TIR) -based chip for highly sensitive fluorescent imagingNam Cao Hoai Le; Dzung Viet Dao; Ryuji Yokokawa; John Wells; Susumu Sugiyama20072007, vol.17, no.6
Fabrication of micro nickel/diamond abrasive pellet array lapping tools using a LIGA-like technologySheng-Yih Luo; Tsung-Han Yu; Yuh-Chung Hu20072007, vol.17, no.6
A method for mechanical characterization of capacitive devices at wafer level via detecting the pull-in voltages of two test bridges with different lengthsYuh-Chung Hu; Wen-Pin Shih; Guan-De Lee20072007, vol.17, no.6
12



国家科技图书文献中心  全球文献资源网  京ICP备05055788号-26  京公网安备11010202008970号  机械工业信息研究院 2018-2025