期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术:传感器,致动器与系统集成
收藏年代1998~2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000~2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2007, vol.13, no.1 2007, vol.13, no.11-12 2007, vol.13, no.2 2007, vol.13, no.3-4 2007, vol.13, no.5-6 2007, vol.13, no.7
2007, vol.13, no.8-10

题名作者出版年年卷期
Theoretical and experimental investigation on electrochemical micromachiningZhaoyang Zhang; Di Zhu; Ningsong Qu; Minghuan Wang20072007, vol.13, no.7
System-level modeling and simulation for an electrostatic-feedback microaccelerometer based on equivalent electrical representationYongquan Wang; Hualing Chen; Xueming He20072007, vol.13, no.7
Squeeze-film effects in MEMS devices with perforated plates for small amplitude vibrationC. Feng; Ya-Pu Zhao; D. Q. Liu20072007, vol.13, no.7
Mathematical analysis and test of an electrostatically actuated micro-power relayS. J. Jeong; D. E. Lee; W. Wang20072007, vol.13, no.7
Head-disk spacing measurement based on Michelson interferometry using white light illuminationY. He; H. Zhang; Y. Mitsuya; K. Fukuzawa20072007, vol.13, no.7
A new technology for microfluidic structures preparation based on a photoimageable ceramicIwona Wyzkiewicz; Natalia Lewandowska; Michal Chudy; Zbigniew Brzozka; Zbigniew Magonski; Barbara Dziurdzia; Malgorzata Jakubowska; Artur Dybko20072007, vol.13, no.7
Shape optimization and dynamic characterization of multiple-electrostatically deformable microbridgesYunqiang Li; Packirisamy Muthukumaran; Rama B. Bhat20072007, vol.13, no.7
Investigation of the influence of design parameters on the flow performance of single and double disk viscous micropumpsA. T. Al-Halhouli; M. I. Kilani; A. Al-Salaymeh; S. Buttgenbach20072007, vol.13, no.7
Vibration analysis of axially moving magnetic tape with comparisons to static and dynamic experimental resultsThomas G. Hayes; Bharat Bhushan20072007, vol.13, no.7
3D-feature-based structure design for silicon fabrication of micro devicesYang Liu; Pingyu Jiang; Dinghong Zhang; Guanghui Zhou20072007, vol.13, no.7
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