期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2007, vol.13, no.1 2007, vol.13, no.11-12 2007, vol.13, no.2 2007, vol.13, no.3-4 2007, vol.13, no.5-6 2007, vol.13, no.7
2007, vol.13, no.8-10

题名作者出版年年卷期
Analysis of the demolding forces during hot embossingYuhua Guo; Gang Liu; Xuelin Zhu; Yangchao Tian20072007, vol.13, no.5-6
Large area and wide dimensions X-ray lithography using energy variable synchrotron radiationYuichi Utsumi; Takefumi Kishimoto; Tadashi Hattori; Hirotsugu Hara20072007, vol.13, no.5-6
Planar microreactor for biochemical application made from silicon and polymer filmsYuichi Utsumi; Yusuke Hitaka; Katsuhiro Matsui; Masahiro Takeo; Seiji Negoro; Yoshiaki Ukita20072007, vol.13, no.5-6
Proton beam writing: a tool for high-aspect ratio mask productionJ. A. van Kan; P. G. Shao; K. Ansari; A. A. Bettiol; T. Osipowicz; F. Watt20072007, vol.13, no.5-6
Fluid filter fabricated by deep X-ray lithography for micro fluidicsYoshiaki Ukita; Toshifumi Asano; Yuichi Utsumi20072007, vol.13, no.5-6
Fabrication of a micro reactor for vertical unit operation using multifunctional fluid filter and its application to biochemical reactionToshifumi Asano; Yoshiaki Ukita; Katsuhiro Matsui; Masahiro Takeo; Seiji Negoro; Yuichi Utsumi20072007, vol.13, no.5-6
Deep microstructuring in glass for microfluidic applicationsChantal Khan Malek; Laurent Robert; Jean-Jacques Boy; Pascal Blind20072007, vol.13, no.5-6
Fabrication of components for a valve-less micropump or microejector by multilevel electroforming technologyS. C. Chen; C. H. Cheng; Y. C. Lin20072007, vol.13, no.5-6
Parameter optimization for an ICP deep silicon etching systemS. C. Chen; Y. C. Lin; J. C. Wu; L. Horng; C. H. Cheng20072007, vol.13, no.5-6
Revisiting micro hot-embossing with moulds in non-conventional materialsChantal Khan Malek; Jean-Rene Coudevylle; Jean-Claude Jeannot; Roland Duffait20072007, vol.13, no.5-6
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