期刊


ISSN0946-7076
刊名Microsystem technologies
参考译名微系统技术：传感器，致动器与系统集成
收藏年代1998～2024

关联期刊参考译名收藏年代
Journal of Information Storage and Processing Systems存储与处理系统信息杂志2000～2001


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1998 1999 2000 2001 2002 2003
2004 2005 2006 2007 2008 2009
2010 2011 2012 2013 2014 2015
2016 2017 2018 2019 2020 2021
2022 2023 2024

2007, vol.13, no.1 2007, vol.13, no.11-12 2007, vol.13, no.2 2007, vol.13, no.3-4 2007, vol.13, no.5-6 2007, vol.13, no.7
2007, vol.13, no.8-10

题名作者出版年年卷期
Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithographySommawan Khumpuang; Mitsuhiro Horade; Kazuya Fujioka; Susumu Sugiyama20072007, vol.13, no.3-4
Mask design compensation for sloped sidewall structures fabricated by X-ray lithographyMitsuhiro Horade; Sommawan Khumpuang; Kazuya Fujioka; Susumu Sugiyama20072007, vol.13, no.3-4
Fabrication of high aspect ratio nano gratings using SR lithographyFumiki Kato; Shinya Fujinawa; Yigui Li; Susumu Sugiyama20072007, vol.13, no.3-4
Fabrication of microgratings on PMMA plate and curved surface by using copper mesh as X-ray lithography maskYigui Li; Susumu Sugiyama20072007, vol.13, no.3-4
High aspect ratio tapered hollow metallic microneedle arrays with microfluidic interconnectorKabseog Kim; Jeong-Bong Lee20072007, vol.13, no.3-4
High aspect ratio air core solenoid inductors using an improved UV-LIGA process with contrast enhancement materialHong Lu; Brandon Pillans; Jong-Chang Lee; Jeong-Bong Lee20072007, vol.13, no.3-4
SU-8 3D microoptic components fabricated by inclined UV lithography in waterZ. Ling; K. Lian20072007, vol.13, no.3-4
In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layerZ. Ling; K. Lian20072007, vol.13, no.3-4
Processing-microstructure-resulting materials properties of LIGA NiK. Lian; J. C. Jiang; Z. G. Ling20072007, vol.13, no.3-4
Method for polymer hot embossing process developmentProyag Datta; Jost Goettert20072007, vol.13, no.3-4
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